Cross-section Viewer
slabs: 7
layers: 5
Cut
Cut at y = 5.00 μmLayers in stack
| sub | -2.00–0.00 | |
| diff | 0.00–0.15 | |
| poly | 0.15–0.33 | |
| M1 | 0.45–0.70 | |
| V1 | 0.70–0.95 | |
| M2 | 0.95–1.25 | |
| V2 | 1.25–1.50 | |
| M3 | 1.50–1.80 | |
| V3 | 1.80–2.05 | |
| M4 | 2.05–2.45 | |
| V4 | 2.45–2.75 | |
| M5 | 2.75–3.25 | |
| V5 | 3.25–3.55 | |
| M6 | 3.55–4.35 |
Plan view (cut line in red)
Cross-section
sub
diff
poly
M2
M5